Photoelectric conversion device and method for manufacturing same
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United States of America Patent
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Jan 23, 2018
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app pub date -
Jul 11, 2014
filing date -
Aug 23, 2013
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Abstract
A photoelectric conversion device capable of preventing anomalous transmission of light of a wavelength that is not supposed to be transmitted and reducing the half-width of a spectral waveform and a method for manufacturing such a photoelectric conversion device are provided. A first photoelectric conversion element is formed on a substrate. A first metal film having a plurality of openings arranged periodically or aperiodically is formed above the first photoelectric conversion element with insulating films interposed therebetween. A second metal film covering a part of the openings in the first metal film is provided.
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