Method for making a transistor in a stack of superimposed semiconductor layers

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9876121
SERIAL NO

15070781

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

A method for making a transistor in which:

    a) on a substrate, at least one semi-conductor structure is made, which is formed by a stack comprising alternating layer(s) based on at least one first semi-conductor material and layer(s) based on at least one second semi-conductor material different from the first semi-conductor material,b) a zone of the structure is made amorphous using implantations, the zone made amorphous comprising one or more portions of one or more layers based on the second semi-conductor material,c) the portions are removed by selectively etching a second semi-conductor material made amorphous towards the first semi-conductor material (FIG. 2L).

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVESFRANCE PARIS PARIS

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Barraud, Sylvain Le Grand Lemps, FR 28 149
Reboh, Shay Sassenage, FR 85 313
Vinet, Maud Claix, FR 97 1808

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
7.5 Year Payment $3600.00 $1800.00 $900.00 Jul 23, 2025
11.5 Year Payment $7400.00 $3700.00 $1850.00 Jul 23, 2029
Fee Large entity fee small entity fee micro entity fee
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00