Trench power transistor structure and manufacturing method thereof
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United States of America Patent
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Jan 23, 2018
Issued Date -
N/A
app pub date -
Jun 22, 2016
filing date -
Jul 31, 2015
priority date (Note) -
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Abstract
A trench power transistor and a manufacturing method thereof are provided. The trench power transistor includes a substrate, an epitaxial layer, a trench gate structure, a body region, and a source region. The epitaxial layer disposed on the substrate has a trench formed therein. The trench gate structure disposed in the trench includes a bottom dielectric structure, a gate dielectric layer, and a gate. The bottom dielectric structure formed in a lower portion of the trench includes an insulating layer formed along a first inner wall of the lower portion of the trench defining a groove, and a non-conductive structure formed in the groove. The gate dielectric layer is formed along a second inner wall of an upper portion of the trench, and the gate is formed in the trench and connects the gate dielectric layer. The body region and the source region are formed in the epitaxial layer.
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