Semiconductor devices, FinFET devices and methods of forming the same

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United States of America Patent

PATENT NO 9876083
SERIAL NO

15009831

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Abstract

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Semiconductor devices, FinFET devices and methods of forming the same are disclosed. One of the semiconductor devices includes a substrate, a gate over the substrate and a gate dielectric layer between the gate and the substrate. The gate dielectric layer includes an oxide-inhibiting layer having a dielectric constant greater than about 8 and being in an amorphous state.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD8 LI-HSIN RD 6 HSINCHU SCIENCE PARK HSINCHU 300-78

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Miin-Jang Taipei, TW 66 230
Chi, Liang-Chen Hsinchu, TW 8 511
Tsai, Chia-Ming Hsinchu County, TW 127 1516
Wang, Chin-Kun Hsinchu, TW 20 521
Wang, Wei-Cheng New Taipei, TW 115 739

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