Three-dimensional semiconductor device and method for forming the same

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United States of America Patent

PATENT NO 9876055
SERIAL NO

15367390

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Abstract

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A three-dimensional semiconductor device includes a multi-layered stack structure with memory layers parallel to each other and separated by interlayer insulation layers; and memory cell structures formed at each memory layer by arranging in a multi-row and multi-column array. One memory cell structure includes a memory material layer; a selector layer formed at an outer surface of the memory material layer and connected to the memory material layer; a first electrode layer formed at an outer surface of the selector layer and electrically connected to the selector layer; and a second electrode layer formed at an inner surface of the memory material layer and connected to the memory material layer, wherein the second electrode layer penetrates the multi-layered stack structure. Each memory layer includes a conductive layer electrically connecting the first electrode layer and the conductive layer electrically connects the adjacent memory cell structures.

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Patent Owner(s)

Patent OwnerAddress
MACRONIX INTERNATIONAL CO LTDNO 16 LI-HSIN RD SCIENCE-BASED INDUSTRIAL PARK HSINCHU

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Shih-Hung Hsinchu County, TW 175 4671

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