Array substrate and manufacturing method thereof and display device
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United States of America Patent
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Jan 23, 2018
Issued Date -
N/A
app pub date -
Aug 17, 2016
filing date -
Jan 5, 2016
priority date (Note) -
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Abstract
A manufacturing method of an array substrate comprises: forming a source and a drain of a thin film transistor on a base; forming a first insulation layer; forming an active layer of the thin film transistor; forming a second insulation layer; forming a first via hole and a second via hole in the first insulation layer and the second insulation layer above the source and the drain, by etching, and forming a third via hole and a fourth via hole in the second insulation layer above the active layer, by etching; forming a first connection line connecting the source with the active layer through the first via hole and the third via hole, a second connection line connecting the drain with the active layer and the pixel electrode through the second via hole and the fourth via hole and a pixel electrode.
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