Semiconductor device and a method of manufacturing the same

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United States of America Patent

PATENT NO 9876033
SERIAL NO

15480934

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Abstract

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A reduction in contaminating impurities in a TFT, and a TFT which is reliable, is obtained in a semiconductor device which uses the TFT. By removing contaminating impurities residing in a film interface of the TFT using a solution containing fluorine, a reliable TFT can be obtained.

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Patent Owner(s)

  • SEMICONDUCTOR ENERGY LABORATORY CO., LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kadono, Masaya Kanagawa, JP 21 275
Kitakado, Hidehito Hyogo, JP 89 2829
Yamauchi, Yukio Shizuoka, JP 81 2443
Yamazaki, Shunpei Tokyo, JP 7526 239327

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