Semiconductor device and method for manufacturing same

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United States of America Patent

PATENT NO 9876030
SERIAL NO

15376019

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Abstract

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A semiconductor device comprises a channel body, a pair of source drain regions provided on the channel body and a gate electrode provided above a part of the channel body between the source drain regions. The semiconductor device further comprises a first insulating layer covering the source drain regions and the gate electrode; contact bodies extending in the first insulating layer electrically connected to the source drain regions respectively; and a silicide layer provided between one of the source drain regions and one of the contact bodies electrically connected thereto. The one of the contact bodies includes a main part extending in the first insulating layer, and an expanded portion expanded along a surface of the one of the source drain regions; and the silicide layer is positioned between the expanded portion and the one of the source drain regions.

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Patent Owner(s)

Patent OwnerAddress
KIOXIA CORPORATION1-21 SHIBAURA 3-CHOME MINATO-KU TOKYO 108-0023

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Okano, Kimitoshi Yokkaichi, JP 21 502

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