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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
APPLIED MATERIALS INC	3050 BOWERS AVENUE SANTA CLARA CA 95054

International Classification(s)

• C23C:COATING METALLIC MATERIAL; COATING MATERIAL WITH M....
• H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....

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Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Balseanu, Mihaela	Sunnyvale, US	77	8585
Li, Ning	San Jose, US	758	4862
Nguyen, Victor	Novato, US	37	3250
Saly, Mark	Santa Clara, US	123	1499
Trinh, Cong	Santa Clara, US	31	95
Xia, Li-Qun	Cupertino, US	258	19800
Yan, Wenbo	Sunnyvale, US	12	69

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date
7.5 Year Payment	$3600.00	$1800.00	$900.00	Jul 23, 2025
11.5 Year Payment	$7400.00	$3700.00	$1850.00	Jul 23, 2029

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge - 7.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge - 11.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
January 23, 2018	US,9875888,B2   US9875888B2	GRANTED PATENT AS SECOND PUBLICATION
April 07, 2016	US,20160099143,A1   US20160099143A1	FIRST PUBLISHED PATENT APPLICATION

Full Text

US Patent No: 9875888

High temperature silicon oxide atomic layer deposition technology

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