Sample holder and analytical vacuum device

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United States of America Patent

PATENT NO 9875878
SERIAL NO

15038879

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Abstract

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Sample transferring can be securely and easily performed between an FIB device, an electron microscope, and an atom probe device, and atom probe analysis can be performed to a material that easily alters due to atmospheric exposure. A sample holder that holds a sample (12) is provided with an atmosphere-isolation mechanism that prevents the sample from altering due to the atmospheric exposure upon the sample transferring between the devices. There is provided a structure enabling of attaching and detaching a housing (21) of a sample holder leading end of a part of the atmosphere-isolation mechanism in an analytical vacuum device, such as the atom probe device.

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Patent Owner(s)

Patent OwnerAddress
HITACHI LTDTOKYO TOKYO METROPOLIS

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hashizume, Tomihiro Tokyo, JP 50 356
Nakayama, Takeshi Tokyo, JP 177 2668
Sugawara, Akira Tokyo, JP 114 1843

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