Charged particle beam writing apparatus and charged particle beam writing method
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United States of America Patent
Stats
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Jan 23, 2018
Grant Date -
Jul 13, 2017
app pub date -
Dec 20, 2016
filing date -
Jan 8, 2016
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A charged particle beam writing apparatus according to an embodiment starts a wiring operation when the sum of the amount of shot data stored in a buffer memory of a transfer control calculator, the amount of shot data being transferred by a transfer unit, and the amount of shot data stored in a buffer memory of a deflection control circuit reaches the amount of data for one stripe region.
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International Classification(s)
- 2016 Application Filing Year
- H01J Class
- 2255 Applications Filed
- 1758 Patents Issued To-Date
- 77.97 % Issued To-Date
Cited Art Landscape
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- 0 Citation Count
- H01J Class
- 0 % this patent is cited more than
- 7 Age
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