Photolithographic illuminator that is telecentric in two directions
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jan 23, 2018
Issued Date -
N/A
app pub date -
Sep 25, 2013
filing date -
Sep 25, 2012
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
The invention relates to a photolithographic illumination device including: a light beam source; a condenser (5); an optical homogenizing system (4), including at least one microlens array (L3, L4), arranged upstream from the condenser (5) such that the image focal plane of the optical homogenizing system is positioned in the object focal plane of the condenser; a shutter (3), arranged in the object focal plane of the optical homogenizing system, and in which the optical homogenizing system includes two microlens arrays (L3, L4), the spacing as well as the arrangement and orientation of the microlenses of which are designed such that, in two directions (X, Y) orthogonal to the optical axis, the optical homogenizing system has merged image focal planes and merged object focal planes. The invention likewise relates to a photolithographic device including such an illuminator.
First Claim
Other Claims data not available
Family
International Classification(s)
- 2013 Application Filing Year
- G03B Class
- 1659 Applications Filed
- 1577 Patents Issued To-Date
- 95.06 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 0 Citation Count
- G03B Class
- 0 % this patent is cited more than
- 7 Age
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