Microelectromechanical mirror assembly

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9874817
SERIAL NO

14469397

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Abstract

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An optical element assembly includes a base, and an element unit. The element unit includes (i) an optical element having an element central axis and an element perimeter; and (ii) an element connector assembly that couples the optical element to the base, the element connector assembly including a flexure assembly having an element flexure and a base flexure. A distal end of the element flexure is coupled to the optical element near the element perimeter, a distal end of the base flexure is coupled to the base, and a proximal end of the element flexure is coupled to a proximal end of the base flexure near the element central axis.

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Patent Owner(s)

Patent OwnerAddress
NIKON CORPORATION1-5-20 NISHIOI SHINAGAWA-KU TOKYO 140-8601

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Binnard, Michael Belmont, US 64 1100
Palmer, Shane R Oro Valley, US 23 300

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