Optical image capturing module, alignment method, and observation method

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United States of America Patent

PATENT NO 9874807
SERIAL NO

14094965

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Abstract

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An optical image capturing module and an alignment method and an observation method for an upper substrate and a lower substrate using the optical image capturing module are provided. The upper substrate and the lower substrate are disposed opposite. The alignment method includes the following steps of: emitting a light ray; filtering the light ray and dividing the light ray into a light ray at first wavelength and a light ray at second wavelength, whereby the light ray at first wavelength irradiates a pattern on the upper substrate, and the light ray at second wavelength irradiates a pattern on the lower substrate; reflecting the pattern on the upper substrate to an image capturing device; reflecting the pattern on the lower substrate to the image capturing device; and determining the positions of the pattern on the upper substrate and the pattern on the lower substrate on the image capturing device.

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Patent Owner(s)

Patent OwnerAddress
METAL INDUSTRIES RESEARCH&DEVELOPMENT CENTRENO 1001 KAONAN HIGHWAY KAOHSIUNG

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Lin, Chorng-Tyan Kaohsiung, TW 7 30
Lin, Shi-Wei Kaohsiung, TW 11 26
Wen, Chih-Chin Hsinchu, TW 8 21
Yang, Chun-Ming Kaohsiung, TW 27 58

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