MEMS reinforcement

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United States of America Patent

PATENT NO 9874742
SERIAL NO

14865757

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Abstract

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An apparatus for micro-electro-mechanical (MEMS) reinforcement is described herein. The apparatus includes a MEMS device and a stiffener. A micro scale mirror is to be embedded in a top layer of a substrate of the MEMS device. The stiffener is to be coupled to a back side of the MEMS device, wherein the stiffener is to stiffen the MEMS device via support of the MEMS device, without increasing a thickness of the MEMS device.

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Patent Owner(s)

Patent OwnerAddress
INTEL CORPORATION2200 MISSION COLLEGE BOULEVARD SANTA CLARA CA 95054

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bareket, Sagy Haifa, IL 7 31
Freedman, Barak Yokneam, IL 53 1252
Hirshberg, Arnon D.N Misgav, IL 16 30
Petronius, Israel Haifa, IL 21 373

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