Tunable filter with levered membrane and longer scan length
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United States of America Patent
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Jan 23, 2018
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N/A
app pub date -
May 25, 2012
filing date -
May 25, 2012
priority date (Note) -
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Abstract
A Fabry-Perot tunable filter comprises a membrane device. The membrane device includes a support structure having an optical port. Also, the membrane device has an optical membrane structure separated from the support structure over the optical port. The optical membrane structure includes a center body portion and an outer body portion. Tethers extend radially from the center body portion to the outer body portion of the optical membrane structure. The center body portion has an area that is about equal or smaller than the area of the optical port.
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