Probe system with multiple actuation locations
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United States of America Patent
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Jan 23, 2018
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N/A
app pub date -
Feb 27, 2015
filing date -
Feb 28, 2014
priority date (Note) -
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Abstract
A probe system including a probe with first and second arms and a probe tip carried by the first and second arms, the probe tip having a height and a tilt angle; an illumination system arranged to deform the probe by illuminating the first arm at a first actuation location and the second arm at a second actuation location each with a respective illumination power; and an actuation controller arranged to independently control the illumination power at each actuation location in order to control the height and tilt angle of the probe tip.
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