Flexible and stretchable sensors formed by patterned spalling
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United States of America Patent
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Jan 23, 2018
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app pub date -
Nov 1, 2016
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Nov 20, 2015
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Abstract
A material removal process referred to as spalling is used to provide flexible and stretchable sensors that can be used for healthcare monitoring, bio-medical devices, wearable electronic devices, artificial skin, large area sensing, etc. The flexible and stretchable sensors of the present application have high sensitivity that is comparable to that of a bulk silicon sensor. The flexible and stretchable sensors comprise single crystalline spring-like structures that couple various resistor structures together.
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