Scatter diagram display device and surface analyzer
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United States of America Patent
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Jan 23, 2018
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app pub date -
Oct 19, 2015
filing date -
Oct 20, 2014
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Abstract
A scatter diagram display device includes a principal component analysis section that performs principal component analysis on intensity or concentration map data that represents each element, a priority level setting section that sets a priority level to each element based on the results of the principal component analysis performed by the principal component analysis section, and a display control section that performs a control process that arranges a plurality of scatter diagrams generated by combining each element based on the priority level that has been set to each element by the priority level setting section, and displays the plurality of scatter diagrams on a display section.
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