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Abstract

A micro-system with integrated multi-axis actuation and sensing capabilities for in-situ calibration of long-term scale-factor drifts in the output signal of attached or monolithically integrated inertial sensors. The micro-system comprises a piezoelectric actuator, integrated position sensors, and a controller. The controller provides the electrical excitation signals to the actuator and receives and processes signals from the inertial sensors and the position sensors. The electrical excitation signals are adjusted to reduce undesired off-axis motion resulting from environmental vibration during operation or from misalignment and digressions from the process tolerance during fabrication. Capacitive position sensors allow for determination of the trajectory of the piezoelectric actuator and for electrostatic pull-down and lock-down of an actuation plate. Piezoelectric signals and piezoresistive signals are used to improve position sensing precision. The actuator trajectory and the corresponding output of the inertial sensors are used by the controller to determine the device parameters of the inertial sensors.

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First Claim