Microfluidic device and method using double anodic bonding

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United States of America Patent

PATENT NO 9873939
SERIAL NO

13235981

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Abstract

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A microfluidic device for use with a microfluidic delivery system, such as an organic vapor jet printing device, includes a glass layer that is directly bonded to a microfabricated die and a metal plate via a double anodic bond. The double anodic bond is formed by forming a first anodic bond at an interface of the microfabricated die and the glass layer, and forming a second anodic bond at an interface of the metal plate and the glass layer, where the second anodic bond is formed using a voltage that is lower than the voltage used to form the first anodic bond. The second anodic bond is formed with the polarity of the voltage reversed with respect to the glass layer and the formation of the first anodic bond. The metal plate includes attachment features that allow removal of the microfluidic device from a fixture.

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Patent Owner(s)

Patent OwnerAddress
THE REGENTS OF THE UNIVERSITY OF MICHIGAN1600 HURON PARKWAY 2ND FLOOR OFFICE OF TECHNOLOGY TRANSFER ANN ARBOR MI 48109-2590
UNIVERSAL DISPLAY CORPORATION250 PHILLIPS BOULEVARD EWING NJ 08618

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Forrest, Stephen Ann Arbor, US 69 1417
Harikrishna, Mohan Siddharth Plainsboro, US 48 269
McGraw, Gregory Ann Arbor, US 95 510
Peters, Diane Ann Arbor, US 2 1

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