Dual signal coaxial cavity resonator plasma generation
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United States of America Patent
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Jan 23, 2018
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app pub date -
Apr 7, 2015
filing date -
Apr 8, 2014
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Abstract
A plasma generator comprises a radio frequency power source, a coaxial cavity resonator assembly, and a direct current power source. The radio frequency power source provides a voltage supply of radio frequency power having a first ratio of power over voltage. The resonator assembly includes a center conductor coupled to the radio frequency power source, and also includes a virtual short circuit. The direct current power source is connected to the center conductor at the virtual short circuit, and provides a voltage supply of direct current power having a second ratio of power over voltage that is less than the first ratio.
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