CMP pad construction with composite material properties using additive manufacturing processes
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United States of America Patent
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Jan 23, 2018
Grant Date -
Apr 21, 2016
app pub date -
Apr 24, 2015
filing date -
Oct 17, 2014
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Abstract
Embodiments of the disclosure generally provide polishing pads includes a composite pad body and methods for forming the polishing pads. One embodiment provides a polishing pad including a composite pad body. The composite pad body includes one or more first features formed from a first material or a first composition of materials, and one or more second features formed from a second material or a second composition of materials, wherein the one or more first features and the one or more second features are formed by depositing a plurality of layers comprising the first material or first composition of materials and second material or second composition of materials.
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