Ultrasonic transducer and method of manufacturing the same
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United States of America Patent
Stats
-
Jan 23, 2018
Issued Date -
N/A
app pub date -
May 1, 2015
filing date -
Jul 21, 2014
priority date (Note) -
In Force
status (Latency Note)
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Abstract
An ultrasonic transducer and a method of manufacturing the same are provided. The ultrasonic transducer includes a substrate, a first insulation layer, and a first thin film layer; a plurality of support members formed on the first thin film layer; a second thin film layer supported by the plurality of support members; a cavity between the first thin film layer and the second thin film layer; and a common ground electrode on the second thin film layer.
First Claim
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International Classification(s)
- 2015 Application Filing Year
- B06B Class
- 255 Applications Filed
- 196 Patents Issued To-Date
- 76.87 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 0 Citation Count
- B06B Class
- 0 % this patent is cited more than
- 7 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Jul 23, 2025 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Jul 23, 2029 |
