Piezoelectric vibrator element, and piezoelectric vibrator
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United States of America Patent
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Jan 16, 2018
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app pub date -
Feb 13, 2017
filing date -
Feb 23, 2016
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Abstract
A piezoelectric vibrator element includes a pair of vibrating arms extending from a base, and having a groove on each of opposing principal surfaces in the longitudinal direction of the vibrating arms. Two systems of excitation electrodes are included on the side surfaces and the opposing principal surfaces, and in the grooves of the vibrating arms. A width of a bank part formed by a side surface of the vibrating arms and a side surface of the groves is W0, and the separation distance between the excitation electrodes on the opposing principal surfaces is W1, such that 1 μm
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