Solid state imaging apparatus, production method thereof and electronic device
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United States of America Patent
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Jan 16, 2018
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N/A
app pub date -
Oct 28, 2016
filing date -
Jul 5, 2013
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Abstract
A solid state imaging apparatus includes an insulation structure formed of an insulation substance penetrating through at least a silicon layer at a light receiving surface side, the insulation structure having a forward tapered shape where a top diameter at an upper portion of the light receiving surface side of the silicon layer is greater than a bottom diameter at a bottom portion of the silicon layer. Also, there are provided a method of producing the solid state imaging apparatus and an electronic device including the solid state imaging apparatus.
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