passivation

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United States of America Patent

PATENT NO 9871124
SERIAL NO

15412519

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Abstract

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The present invention generally relates to a method of manufacturing a TFT. The TFT has an active channel that comprises IGZO or zinc oxide. After the source and drain electrodes are formed, but before the passivation layers or etch stop layers are deposited thereover, the active channel is exposed to an N2O or O2 plasma. The interface between the active channel and the passivation layers or etch stop layers are either altered or damaged during formation of the source and drain electrodes. The N2O or O2 plasma alters and repairs the interface between the active channel and the passivation or etch stop layers.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CA 95054

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Jrjyan Jerry Campbell, US 45 686
Choi, Soo Young Fremont, US 263 13902
Ye, Yan Saratoga, US 658 18349
Yim, Dong-Kil Pleasanton, US 38 1106

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