Semiconductor device and method for manufacturing same

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United States of America Patent

PATENT NO 9871054
SERIAL NO

15257406

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Abstract

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According to one embodiment, the stacked body includes a plurality of electrode layers stacked with an insulator interposed. The electrode layers have a plurality of terrace portions arranged in a stairstep configuration with a difference in levels. The insulating layer is provided above the terrace portions. The columnar portions extend in a stacking direction of the stacked body through the insulating layer and through the stacked body under the insulating layer. The columnar portions are insulative. The contact portions are provided at side surfaces of the columnar portions on the terrace portions. The contact portions are connected to the terrace portions.

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Patent Owner(s)

Patent OwnerAddress
KIOXIA CORPORATION1-21 SHIBAURA 3-CHOME MINATO-KU TOKYO 108-0023

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Imamura, Tsubasa Mie, JP 26 99
Sasaki, Toshiyuki Mie, JP 131 776
Takahashi, Atsushi Mie, JP 443 3708

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