Electrical fuse and/or resistor structures
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United States of America Patent
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Jan 16, 2018
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app pub date -
Mar 22, 2017
filing date -
Aug 14, 2015
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Abstract
Electrical fuse (eFuse) and resistor structures and methods of manufacture are provided. The method includes forming metal gates having a capping material on a top surface thereof. The method further includes protecting the metal gates and the capping material during an etching process which forms a recess in a dielectric material. The method further includes forming an insulator material and metal material within the recess. The method further includes forming a contact in direct electrical contact with the metal material.
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