Electrostatic chuck and temperature-control method for the same
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United States of America Patent
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Jan 16, 2018
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app pub date -
Jul 28, 2015
filing date -
Jul 28, 2015
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Abstract
An electrostatic chuck includes a chuck base and cooling pipes. The chuck base has at least four cooling zones, in which the cooling zones viewed at a direction normal to the chuck base are fan-shaped. The cooling pipes are respectively disposed in the cooling zones of the chuck base. Therefore, the cooling pipes disposed in the different cooling zones can be controlled individually.
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