Li-containing oxide target assembly
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United States of America Patent
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Jan 16, 2018
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app pub date -
Apr 28, 2014
filing date -
Apr 30, 2013
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Abstract
Provided is a target assembly which is manufactured by bonding a Li-containing oxide sputtering target and an Al-based or Cu-based backing plate through a bonding material. The Li-containing oxide target assembly does not undergo warping or cracking during the bonding. The Li-containing oxide target assembly according to the present invention is manufactured by bonding a Li-containing oxide sputtering target to a backing plate via a bonding material, and has bending strength of 20 MPa or larger.
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