Methods and systems for managing semiconductor manufacturing equipment
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United States of America Patent
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Jan 16, 2018
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N/A
app pub date -
Feb 25, 2015
filing date -
Jul 30, 2014
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Abstract
Provided are methods and systems for managing semiconductor manufacturing equipment. A method may include preventive maintenance involving steps of disassembling, cleaning, and assembling parts of a chamber. The assembling of the parts may include checking whether the parts are correctly assembled, using reflectance and absorptivity of a high-frequency voltage applied to the parts.
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