Symmetrical plural-coil plasma source with side RF feeds and RF distribution plates

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United States of America Patent

PATENT NO 9870897
SERIAL NO

14319089

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Abstract

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A plasma reactor has an overhead inductively coupled plasma source with two coil antennas and symmetric and radial RF feeds and cylindrical RF shielding around the symmetric and radial RF feeds. The radial RF feeds are symmetrically fed to the plasma source.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CA 95054

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Carducci, James D Sunnyvale, US 109 4234
Collins, Kenneth S San Jose, US 310 28285
Fovell, Richard San Jose, US 43 1376
Kenney, Jason A Sunnyvale, US 22 832
Ramaswamy, Kartik San Jose, US 371 20119
Rauf, Shahid Pleasanton, US 151 5635

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