System and method for controlling ion implanter
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United States of America Patent
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Jan 16, 2018
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app pub date -
Dec 6, 2013
filing date -
Dec 6, 2013
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Abstract
A system, a method, and a non-transitory computer readable storage medium for controlling an ion implanter are disclosed herein. The system includes a sample module and a control module. The sample module is configured to generate a summarized value from process data of the ion implanter, and the process data correspond to a control parameter. The control module is configured to tune a control parameter, and the control module performs an ion implantation by releasing tools of the ion implanter in accordance with the control parameter when the summarized value meets a predetermined stability requirement.
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