Polarized light irradiating apparatus and method of irradiating polarized light for photo alignment
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United States of America Patent
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Jan 16, 2018
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app pub date -
Jul 27, 2016
filing date -
Mar 8, 2013
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Abstract
An irradiating method includes a first mounting step of mounting a substrate onto a first stage at a first position and a second mounting step of mounting a substrate onto a second stage at a second position, a first movement step of moving the first stage to the irradiation area for irradiating polarized light onto the substrate and returning the first stage to the first position, a second movement step of moving the second stage to the irradiation area and returning the second stage to the second position, a first collecting step of collecting the substrate and a second collecting step of collecting the substrate. A time zone of the first collecting step and first mounting step and a time zone of the second movement step overlap. A time zone of the second collecting step and second mounting step and a time zone of the first movement step overlap.
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