Method for imaging a feature using a scanning probe microscope
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United States of America Patent
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Jan 16, 2018
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app pub date -
Feb 3, 2016
filing date -
Feb 3, 2015
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Abstract
Using a local-potential-driving probe drives a conductor to a known potential while adjacent lines are grounded through the sample body reduces electrostatic scanning microscope signal from adjacent lines, allows imaging of metal lines deeper in the sample. Providing different potentials locally on different conductive lines using multiple local-potential-driving probes allows different conductors to be highlighted in the same image, for example, by changing the phase of the signal being applied to the different local-potential-driving probes.
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