Atomic-force microscope system with integrated fabry-perot resonator
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United States of America Patent
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Jan 16, 2018
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app pub date -
Aug 26, 2016
filing date -
Aug 26, 2016
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Abstract
An atomic-force microscope system is provided including: an electrically conducting cantilever support; an electrically insulating element; and an electrically conducting cantilever anchored at a first end to the cantilever support via the insulating element, the cantilever including a probe tip at a second end opposite to the first end and the cantilever support is configured as a backside electrode of the cantilever for backside actuation thereof; a Fabry-Perot interferometer including: a resonator with a first mirror defined on the cantilever; and a second mirror defined on the cantilever support having a first side and a second side configured to allow light injection, opposite to the first side, the latter extending at least partly vis-à-vis the first mirror. The interferometer includes a light-emitting device, and a detector configured for detecting a property of the system impacted by interferences of light emitted by the light-emitting device. Methods of operations are also provided.
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