Method and apparatus of electrical property measurement using an AFM operating in peak force tapping mode

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United States of America Patent

PATENT NO 9869694
SERIAL NO

14970237

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Abstract

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An apparatus and method of collecting topography, mechanical property data and electrical property data with an atomic force microscope (AFM) in either a single pass or a dual pass operation. PFT mode is preferably employed thus allowing the use of a wide range of probes, one benefit of which is to enhance the sensitivity of electrical property measurement.

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Patent Owner(s)

Patent OwnerAddress
BRUKER NANO INC112 ROBIN HILL ROAD SANTA BARBARA CA 93117

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
He, Jianli Goleta, US 5 23
Hu, Shuiqing Santa Barbara, US 28 165
Hu, Yan Ventura, US 66 296
Huang, Lin Santa Barbara, US 228 2115
Li, Chunzeng Goleta, US 3 33
Ma, Ji Thousand Oaks, US 49 352
Minne, Stephen C Santa Barbara, US 36 877
Mittel, Henry San Ramon, US 6 25
Su, Chanmin Ventura, US 62 764
Wang, Weijie Thousand Oaks, US 84 469

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