Micromechanical Z-sensor
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United States of America Patent
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Jan 16, 2018
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app pub date -
Nov 7, 2014
filing date -
Nov 8, 2013
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Abstract
A micromechanical Z-sensor, including a rocker having trough structures which is twistably supported with the aid of a spring device, the rocker having a mass distribution which is asymmetric with respect to the spring device, first electrodes situated above the trough structure, and second electrodes situated below the rocker, and a catch device including at least one spring element against which a stop element which is anchored to a substrate is able to strike, at least two catch devices which are spatially separated from each other being provided per rocker arm of the rocker.
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