Inertial angular sensor of balanced MEMS type and method for balancing such a sensor
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United States of America Patent
Stats
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Jan 16, 2018
Grant Date -
Oct 9, 2014
app pub date -
Dec 3, 2012
filing date -
Dec 6, 2011
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
An inertial angular sensor of MEMS type has a support of at least two masses which are mounted movably with respect to the support, at least one electrostatic actuator and at least one electrostatic detector. The masses are suspended in a frame itself connected by suspension means to the support. The actuator and the detector are designed to respectively produce and detect a vibration of the masses, and a method for balancing such a sensor provided with at least one load detector mounted between the frame and the support and with at least one electrostatic spring placed between the frame and one of the masses and slaved so as to ensure dynamic balancing of the sensor as a function of a measurement signal of the load sensor.
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Patent Citation Ranking
- 1 Citation Count
- H01L Class
- 23.71 % this patent is cited more than
- 7 Age
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