Vacuum pump
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United States of America Patent
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Jan 16, 2018
Issued Date -
N/A
app pub date -
Jul 23, 2014
filing date -
Jul 26, 2013
priority date (Note) -
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Abstract
A vacuum pump includes a pump inlet, a pump outlet, a rotor rotatable about an axis of rotation, at least one process gas pump stage for conveying a process gas present at the pump inlet from the pump inlet to the pump outlet, a motor space, and a drive motor which is arranged in the motor space, is configured for rotationally driving the rotor and which has a motor stator, wherein at least one gas path is provided for the process gas from the pump inlet to the pump outlet which leads through the motor space and which leads at least sectionally along the motor stator or through the motor stator.
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