Pump
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United States of America Patent
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Jan 16, 2018
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N/A
app pub date -
Feb 7, 2013
filing date -
Feb 8, 2012
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Abstract
The present invention relates to a multi-stage vacuum pump having a plurality of compression stages 12, 14, 16, 18 20 and a booster stage 22. The pump 10 is arranged to pump a chamber 24. The pumping stages include respective rotors supported for rotation on one or more common drive shafts 26. A recirculation valve 28 is associated with the booster stage 22 for selective recirculation of pumped fluid from an outlet 32 to an inlet 30 of the booster stage above a predetermined pressure.
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