Composition for metal plating comprising suppressing agent for void free submicron feature filling

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United States of America Patent

PATENT NO 9869029
SERIAL NO

13387776

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Abstract

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According to the present invention a composition is provided comprising at least one source of metal ions and at least one additive obtainable by reacting a) a polyhydric alcohol condensate compound derived from at least one polyalcohol of formula (I)

description='In-line Formulae' end='lead'X(OH)n  (I)description='In-line Formulae' end='tail'

by condensation with b) at least one alkylene oxide to form a polyhydric alcohol condensate comprising polyoxyalkylene side chains, wherein n is an integer from 3 to 6 and X is an n-valent linear or branched aliphatic or cycloaliphatic radical having from 2 to 10 carbon atoms, which may be substituted or unsubstituted.

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Patent Owner(s)

Patent OwnerAddress
BASF SELUDWIGSHAFEN GERMANY LUDWIGSHAFEN RHINELAND-PALATINATE

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Emnet, Charlotte Stuttgart, DE 33 122
Haag, Alexandra Hemhofen, DE 10 62
Mayer, Dieter Darmstadt, DE 60 684
Raether, Roman Benedikt Speyer, DE 44 243
Roeger-Goepfert, Cornelia Schwetzingen, DE 27 164

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