Cleaning composition and method of manufacturing metal wiring using the same

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United States of America Patent

PATENT NO 9869027
SERIAL NO

15134672

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Abstract

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A cleaning composition includes about 0.01 to about 5 wt % of a chelating agent; about 0.01 to about 0.5 wt % of an organic acid; about 0.01 to about 1.0 wt % of an inorganic acid; about 0.01 to about 5 wt % of an alkali compound; and deionized water.

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Patent Owner(s)

Patent OwnerAddress
SAMSUNG DISPLAY CO LTDGYEONGGI DO SOUTH KOREA GYEONGGI-DO

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Han, Jong-Su Pyeongtaek-si, KR 2 7
Jeon, Seong-Sik Pyeongtaek-si, KR 2 7
Ju, Jin-Ho Yongin, KR 73 231
Kim, Bong-Yeon Yongin, KR 28 79
Lee, Seok-Ho Pyeongtaek-si, KR 13 103
Song, Jung-Hwan Pyeongtaek-si, KR 8 15
Woo, Jun-Hyuk Yongin, KR 9 13

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