Abrasive agent for substrates and substrate manufacturing method

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United States of America Patent

PATENT NO 9868886
APP PUB NO 20140357162A1
SERIAL NO

14369881

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Abstract

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Provided is an abrasive agent for substrates that includes, as an abrasive material component in the abrasive agent, cerium oxide as the main component. The abrasive agent for substrates includes soluble silica and cerium oxide. The concentration ratio of the soluble silica, calculated as Si content, and the cerium oxide in the abrasive agent is 0.001:1 to 0.1:1.

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Patent Owner(s)

Patent OwnerAddress
KONICA MINOLTA INCTOKYO TOKYO METROPOLIS

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Nakae, Hazuki Kyoto, JP 9 15

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