Extreme ultraviolet light source device
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United States of America Patent
Stats
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Jan 9, 2018
Issued Date -
N/A
app pub date -
Aug 4, 2015
filing date -
Nov 17, 2014
priority date (Note) -
In Force
status (Latency Note)
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Abstract
An extreme ultraviolet (EUV) light source device includes a source droplet generator for generating source droplets as a target source for generating extreme ultraviolet (EUV) light and for injecting the source droplets to a collector, a light irradiator for directing a detection light to an injection path of the source droplets, a light detector for detecting the detection light blocked by the source droplet, and a source droplet controller electrically connected to the light detector and the source droplet generator for analyzing the detection light to determine whether a satellite of the source droplet is generated or to determine a size of the generated satellite and for controlling a formation of a stream of source droplets based on the determination result.
First Claim
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International Classification(s)
- 2015 Application Filing Year
- G21K Class
- 287 Applications Filed
- 220 Patents Issued To-Date
- 76.66 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 0 Citation Count
- G21K Class
- 0 % this patent is cited more than
- 7 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Jul 9, 2025 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Jul 9, 2029 |
