Vertical cavity surface emitting laser array and method for manufacturing the same
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United States of America Patent
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Jan 9, 2018
Grant Date -
Jun 2, 2016
app pub date -
Jan 21, 2016
filing date -
Jul 22, 2013
priority date (Note) -
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Abstract
A VCSEL array includes a base substrate, a plurality of VCSEL devices and an inter-device line. Each of the plurality of VCSEL devices is disposed on a front side of the base substrate. The inter-device line connects two of the plurality of VCSEL devices that are adjacent to each other, the two VCSEL devices being connected in series such that forward directions of the two VCSEL devices are the same. An insulating groove that electrically insulates the two VCSEL devices is formed on the base substrate.
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