Single and double diffusion breaks on integrated circuit products comprised of FinFET devices

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United States of America Patent

PATENT NO 9865704
SERIAL NO

15168690

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Abstract

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One illustrative integrated circuit product disclosed herein includes, among other things, a plurality of FinFET devices, each of which comprises a gate structure comprising a high-k gate insulation material and at least one layer of metal, a single diffusion break (SDB) isolation structure positioned in a first trench defined in a semiconductor substrate between first and second active regions, the SDB isolation structure comprising the high-k insulating material and the at least one layer of metal, and a double diffusion break (DDB) isolation structure positioned in a second trench defined in a semiconductor substrate between third and fourth active regions, the DDB isolation structure comprising a first insulating material that substantially fills the second trench.

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Patent Owner(s)

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GLOBALFOUNDRIES U S INC400 STONEBREAK ROAD EXTENSION MALTA NY 12020

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kim, Ryan Ryoung-Han Albany, US 37 828
Lim, Kwan-Yong Niskayuna, US 111 1611
Sung, Min Gyu Latham, US 235 2118
Xie, Ruilong Niskayuna, US 1683 12538

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