Semiconductor devices

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9865594
APP PUB NO 20160372415A1
SERIAL NO

15015296

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Abstract

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A semiconductor device may include a plurality of wiring structures spaced apart from each other, a protection pattern including a metal nitride on each of the wiring structures, a spacer on a sidewall of the protection pattern, and an insulating interlayer structure containing the wiring structures and having an air gap between the wiring structures.

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Patent Owner(s)

Patent OwnerAddress
SAMSUNG ELECTRONICS CO LTDGYEONGGI DO SOUTH KOREA GYEONGGI-DO

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ahn, Sang-Hoon Goyang-si, KR 45 878
Siew, Yong-Kong Suwon-si, KR 2 30

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