Semiconductor structure and manufacturing method thereof

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United States of America Patent

PATENT NO 9865566
SERIAL NO

15183131

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Abstract

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A semiconductor structure includes a substrate, a redistribution layer (RDL) including a dielectric layer disposed over the substrate and a plurality of conductive members surrounded by the dielectric layer, a first conductive pillar disposed over and electrically connected with one of the plurality of conductive members, a second conductive pillar disposed over and electrically connected with one of the plurality of conductive member, a first die disposed over the RDL and electrically connected with the first conductive pillar, and a second die disposed over the RDL and electrically connected with the second conductive pillar, wherein a height of the second conductive pillar is substantially greater than a height of the first conductive pillar, and a thickness of the first die is substantially greater than a thickness of the second die.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD8 LI-HSIN RD 6 HSINCHU SCIENCE PARK HSINCHU 300-78

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Chin-Liang Kaohsiung, TW 101 714
Ho, Kuan-Lin Hsinchu, TW 60 346
Liang, Yu-Min Zhongli, TW 98 458
Yu, Chi-Yang Taoyuan County, TW 53 445

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